Characteristics of Cu-W Thin Films-钨钼稀土标准知识网

Characteristics of Cu-W Thin Films

Cu-W alloy thin films with W content of 1.51%~14.20% were deposited by magnetron co-sputte-ring.The composition, structure, properties of Cu-W thin films were investigated by EDX, XRD, SEM, microhardness instrument and resistivity meter.